| 普通话 | cmn-000 |
| 光刻法 | |
| 普通话 | cmn-000 | 光刻 |
| 普通话 | cmn-000 | 光蚀刻 |
| English | eng-000 | photoetching |
| English | eng-000 | photolithography |
| English | eng-000 | photolithography photoetching method |
| English | eng-000 | photomasking |
| English | eng-000 | photoprocessing |
| English | eng-000 | photoresist process |